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Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer

This paper presents a bistable microswitch fully batch-fabricated on a single glass wafer, comprising of a microactuator, a signal transformer, a microspring and a permanent magnet. The bistable mechanism of the microswitch with large displacement of 160 μm depends on the balance of the magnetic for...

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Detalles Bibliográficos
Autores principales: Miao, Xiaodan, Dai, Xuhan, Huang, Yi, Ding, Guifu, Zhao, Xiaolin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4883325/
https://www.ncbi.nlm.nih.gov/pubmed/27164107
http://dx.doi.org/10.3390/s16050634