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Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer
This paper presents a bistable microswitch fully batch-fabricated on a single glass wafer, comprising of a microactuator, a signal transformer, a microspring and a permanent magnet. The bistable mechanism of the microswitch with large displacement of 160 μm depends on the balance of the magnetic for...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4883325/ https://www.ncbi.nlm.nih.gov/pubmed/27164107 http://dx.doi.org/10.3390/s16050634 |