Planar Position Sensor Based on Mono Sensing Electrode and Hybrid-Frequency Excitation

A new way of measuring planar position for micrometric and sub-micrometric applications is presented with a mono sensing electrode and hybrid-frequency excitation. The sensing theory and operation principle are described and summarized, and a printed circuit board (PCB) sensor prototype is built and...

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Detalles Bibliográficos
Autores principales: Yu, Hongxiang, Zhang, Yu, Shen, Mengfeng, Zhang, Hongli, Gao, Zhao, Wang, Dongyun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4883382/
https://www.ncbi.nlm.nih.gov/pubmed/27187404
http://dx.doi.org/10.3390/s16050691

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4883382/
https://www.ncbi.nlm.nih.gov/pubmed/27187404
http://dx.doi.org/10.3390/s16050691

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