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Planar Position Sensor Based on Mono Sensing Electrode and Hybrid-Frequency Excitation
A new way of measuring planar position for micrometric and sub-micrometric applications is presented with a mono sensing electrode and hybrid-frequency excitation. The sensing theory and operation principle are described and summarized, and a printed circuit board (PCB) sensor prototype is built and...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4883382/ https://www.ncbi.nlm.nih.gov/pubmed/27187404 http://dx.doi.org/10.3390/s16050691 |