Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer

A micromachined electrostatically-suspended accelerometer (MESA) is a kind of three-axis inertial sensor based on fully-contactless electrostatic suspension of the proof mass (PM). It has the potential to offer broad bandwidth, high sensitivity, wide dynamic range and, thus, would be perfectly suite...

Descripción completa

Detalles Bibliográficos
Autores principales: Yin, Yonggang, Sun, Boqian, Han, Fengtian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4883402/
https://www.ncbi.nlm.nih.gov/pubmed/27213376
http://dx.doi.org/10.3390/s16050711

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4883402/
https://www.ncbi.nlm.nih.gov/pubmed/27213376
http://dx.doi.org/10.3390/s16050711

Ejemplares similares