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Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer

A micromachined electrostatically-suspended accelerometer (MESA) is a kind of three-axis inertial sensor based on fully-contactless electrostatic suspension of the proof mass (PM). It has the potential to offer broad bandwidth, high sensitivity, wide dynamic range and, thus, would be perfectly suite...

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Detalles Bibliográficos
Autores principales: Yin, Yonggang, Sun, Boqian, Han, Fengtian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4883402/
https://www.ncbi.nlm.nih.gov/pubmed/27213376
http://dx.doi.org/10.3390/s16050711

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