An Inductively Coupled Plasma Source for the Gaseous Electronics Conference RF Reference Cell

In order to extend the operating range of the GEC RF Reference Cell, we developed an inductively coupled plasma source that replaced the standard parallel-plate upper-electrode assembly. Voltage and current probes, Langmuir probes, and an 80 GHz interferometer provided information on plasmas formed...

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Detalles Bibliográficos
Autores principales: Miller, Paul A., Hebner, Gregory A., Greenberg, Kenneth E., Pochan, Paul D., Aragon, Ben P.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1995
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4887237/
https://www.ncbi.nlm.nih.gov/pubmed/29151752
http://dx.doi.org/10.6028/jres.100.032

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4887237/
https://www.ncbi.nlm.nih.gov/pubmed/29151752
http://dx.doi.org/10.6028/jres.100.032

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