Studies of Ion Kinetic-Energy Distributions in the Gaseous Electronics Conference RF Reference Cell

A review is presented of kinetic-energy distribution measurements for ions striking grounded surfaces in a Gaseous Electronics Conference (GEC) rf Reference Cell. Two experimental arrangements that have been used to measure ion energies in the GEC Cell are described, and a comparison of their perfor...

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Detalles Bibliográficos
Autores principales: Olthoff, J. K., Van Brunt, R. J., Radovanov, S. B.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1995
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4887239/
https://www.ncbi.nlm.nih.gov/pubmed/29151749
http://dx.doi.org/10.6028/jres.100.029

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4887239/
https://www.ncbi.nlm.nih.gov/pubmed/29151749
http://dx.doi.org/10.6028/jres.100.029

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