Optical Emission Spectroscopy on the Gaseous Electronics Conference RF Reference Cell

A summary of the experimental observations of the optical emission from the Gaseous Electronics Conference (GEC) rf Reference Cell plasma will be discussed. Spatially and temporally resolved results are provided for various reference and non-reference conditions, including etching type plasmas. Thes...

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Detalles Bibliográficos
Autor principal: Roberts, J. R.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1995
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4887241/
https://www.ncbi.nlm.nih.gov/pubmed/29151747
http://dx.doi.org/10.6028/jres.100.027

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4887241/
https://www.ncbi.nlm.nih.gov/pubmed/29151747
http://dx.doi.org/10.6028/jres.100.027

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