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Optical Emission Spectroscopy on the Gaseous Electronics Conference RF Reference Cell
A summary of the experimental observations of the optical emission from the Gaseous Electronics Conference (GEC) rf Reference Cell plasma will be discussed. Spatially and temporally resolved results are provided for various reference and non-reference conditions, including etching type plasmas. Thes...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
1995
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4887241/ https://www.ncbi.nlm.nih.gov/pubmed/29151747 http://dx.doi.org/10.6028/jres.100.027 |