Mechanisms of Low-Temperature Nitridation Technology on a TaN Thin Film Resistor for Temperature Sensor Applications

In this letter, we propose a novel low-temperature nitridation technology on a tantalum nitride (TaN) thin film resistor (TFR) through supercritical carbon dioxide (SCCO(2)) treatment for temperature sensor applications. We also found that the sensitivity of temperature of the TaN TFR was improved a...

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Detalles Bibliográficos
Autores principales: Chen, Huey-Ru, Chen, Ying-Chung, Chang, Ting-Chang, Chang, Kuan-Chang, Tsai, Tsung-Ming, Chu, Tian-Jian, Shih, Chih-Cheng, Chuang, Nai-Chuan, Wang, Kao-Yuan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2016
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4889533/
https://www.ncbi.nlm.nih.gov/pubmed/27251325
http://dx.doi.org/10.1186/s11671-016-1480-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4889533/
https://www.ncbi.nlm.nih.gov/pubmed/27251325
http://dx.doi.org/10.1186/s11671-016-1480-z

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