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Mechanisms of Low-Temperature Nitridation Technology on a TaN Thin Film Resistor for Temperature Sensor Applications
In this letter, we propose a novel low-temperature nitridation technology on a tantalum nitride (TaN) thin film resistor (TFR) through supercritical carbon dioxide (SCCO(2)) treatment for temperature sensor applications. We also found that the sensitivity of temperature of the TaN TFR was improved a...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4889533/ https://www.ncbi.nlm.nih.gov/pubmed/27251325 http://dx.doi.org/10.1186/s11671-016-1480-z |