Cargando…
Improved Gate Dielectric Deposition and Enhanced Electrical Stability for Single-Layer MoS(2) MOSFET with an AlN Interfacial Layer
Transistors based on MoS(2) and other TMDs have been widely studied. The dangling-bond free surface of MoS(2) has made the deposition of high-quality high-k dielectrics on MoS(2) a challenge. The resulted transistors often suffer from the threshold voltage instability induced by the high density tra...
Autores principales: | , , , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2016
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4899804/ https://www.ncbi.nlm.nih.gov/pubmed/27279454 http://dx.doi.org/10.1038/srep27676 |
_version_ | 1782436535914725376 |
---|---|
author | Qian, Qingkai Li, Baikui Hua, Mengyuan Zhang, Zhaofu Lan, Feifei Xu, Yongkuan Yan, Ruyue Chen, Kevin J. |
author_facet | Qian, Qingkai Li, Baikui Hua, Mengyuan Zhang, Zhaofu Lan, Feifei Xu, Yongkuan Yan, Ruyue Chen, Kevin J. |
author_sort | Qian, Qingkai |
collection | PubMed |
description | Transistors based on MoS(2) and other TMDs have been widely studied. The dangling-bond free surface of MoS(2) has made the deposition of high-quality high-k dielectrics on MoS(2) a challenge. The resulted transistors often suffer from the threshold voltage instability induced by the high density traps near MoS(2)/dielectric interface or inside the gate dielectric, which is detrimental for the practical applications of MoS(2) metal-oxide-semiconductor field-effect transistor (MOSFET). In this work, by using AlN deposited by plasma enhanced atomic layer deposition (PEALD) as an interfacial layer, top-gate dielectrics as thin as 6 nm for single-layer MoS(2) transistors are demonstrated. The AlN interfacial layer not only promotes the conformal deposition of high-quality Al(2)O(3) on the dangling-bond free MoS(2), but also greatly enhances the electrical stability of the MoS(2) transistors. Very small hysteresis (ΔV(th)) is observed even at large gate biases and high temperatures. The transistor also exhibits a low level of flicker noise, which clearly originates from the Hooge mobility fluctuation instead of the carrier number fluctuation. The observed superior electrical stability of MoS(2) transistor is attributed to the low border trap density of the AlN interfacial layer, as well as the small gate leakage and high dielectric strength of AlN/Al(2)O(3) dielectric stack. |
format | Online Article Text |
id | pubmed-4899804 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2016 |
publisher | Nature Publishing Group |
record_format | MEDLINE/PubMed |
spelling | pubmed-48998042016-06-13 Improved Gate Dielectric Deposition and Enhanced Electrical Stability for Single-Layer MoS(2) MOSFET with an AlN Interfacial Layer Qian, Qingkai Li, Baikui Hua, Mengyuan Zhang, Zhaofu Lan, Feifei Xu, Yongkuan Yan, Ruyue Chen, Kevin J. Sci Rep Article Transistors based on MoS(2) and other TMDs have been widely studied. The dangling-bond free surface of MoS(2) has made the deposition of high-quality high-k dielectrics on MoS(2) a challenge. The resulted transistors often suffer from the threshold voltage instability induced by the high density traps near MoS(2)/dielectric interface or inside the gate dielectric, which is detrimental for the practical applications of MoS(2) metal-oxide-semiconductor field-effect transistor (MOSFET). In this work, by using AlN deposited by plasma enhanced atomic layer deposition (PEALD) as an interfacial layer, top-gate dielectrics as thin as 6 nm for single-layer MoS(2) transistors are demonstrated. The AlN interfacial layer not only promotes the conformal deposition of high-quality Al(2)O(3) on the dangling-bond free MoS(2), but also greatly enhances the electrical stability of the MoS(2) transistors. Very small hysteresis (ΔV(th)) is observed even at large gate biases and high temperatures. The transistor also exhibits a low level of flicker noise, which clearly originates from the Hooge mobility fluctuation instead of the carrier number fluctuation. The observed superior electrical stability of MoS(2) transistor is attributed to the low border trap density of the AlN interfacial layer, as well as the small gate leakage and high dielectric strength of AlN/Al(2)O(3) dielectric stack. Nature Publishing Group 2016-06-09 /pmc/articles/PMC4899804/ /pubmed/27279454 http://dx.doi.org/10.1038/srep27676 Text en Copyright © 2016, Macmillan Publishers Limited http://creativecommons.org/licenses/by/4.0/ This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ |
spellingShingle | Article Qian, Qingkai Li, Baikui Hua, Mengyuan Zhang, Zhaofu Lan, Feifei Xu, Yongkuan Yan, Ruyue Chen, Kevin J. Improved Gate Dielectric Deposition and Enhanced Electrical Stability for Single-Layer MoS(2) MOSFET with an AlN Interfacial Layer |
title | Improved Gate Dielectric Deposition and Enhanced Electrical Stability for Single-Layer MoS(2) MOSFET with an AlN Interfacial Layer |
title_full | Improved Gate Dielectric Deposition and Enhanced Electrical Stability for Single-Layer MoS(2) MOSFET with an AlN Interfacial Layer |
title_fullStr | Improved Gate Dielectric Deposition and Enhanced Electrical Stability for Single-Layer MoS(2) MOSFET with an AlN Interfacial Layer |
title_full_unstemmed | Improved Gate Dielectric Deposition and Enhanced Electrical Stability for Single-Layer MoS(2) MOSFET with an AlN Interfacial Layer |
title_short | Improved Gate Dielectric Deposition and Enhanced Electrical Stability for Single-Layer MoS(2) MOSFET with an AlN Interfacial Layer |
title_sort | improved gate dielectric deposition and enhanced electrical stability for single-layer mos(2) mosfet with an aln interfacial layer |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4899804/ https://www.ncbi.nlm.nih.gov/pubmed/27279454 http://dx.doi.org/10.1038/srep27676 |
work_keys_str_mv | AT qianqingkai improvedgatedielectricdepositionandenhancedelectricalstabilityforsinglelayermos2mosfetwithanalninterfaciallayer AT libaikui improvedgatedielectricdepositionandenhancedelectricalstabilityforsinglelayermos2mosfetwithanalninterfaciallayer AT huamengyuan improvedgatedielectricdepositionandenhancedelectricalstabilityforsinglelayermos2mosfetwithanalninterfaciallayer AT zhangzhaofu improvedgatedielectricdepositionandenhancedelectricalstabilityforsinglelayermos2mosfetwithanalninterfaciallayer AT lanfeifei improvedgatedielectricdepositionandenhancedelectricalstabilityforsinglelayermos2mosfetwithanalninterfaciallayer AT xuyongkuan improvedgatedielectricdepositionandenhancedelectricalstabilityforsinglelayermos2mosfetwithanalninterfaciallayer AT yanruyue improvedgatedielectricdepositionandenhancedelectricalstabilityforsinglelayermos2mosfetwithanalninterfaciallayer AT chenkevinj improvedgatedielectricdepositionandenhancedelectricalstabilityforsinglelayermos2mosfetwithanalninterfaciallayer |