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Contact-free experimental determination of the static flexural spring constant of cantilever sensors using a microfluidic force tool

Micro- and nanocantilevers are employed in atomic force microscopy (AFM) and in micro- and nanoelectromechanical systems (MEMS and NEMS) as sensing elements. They enable nanomechanical measurements, are essential for the characterization of nanomaterials, and form an integral part of many nanoscale...

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Detalles Bibliográficos
Autores principales: Parkin, John D, Hähner, Georg
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4901535/
https://www.ncbi.nlm.nih.gov/pubmed/27335740
http://dx.doi.org/10.3762/bjnano.7.43