Interlaboratory Study on the Lithographically Produced Scanning Electron Microscope Magnification Standard Prototype

NIST is in the process of developing a new scanning electron microscope (SEM) magnification calibration reference standard useful at both high and low accelerating voltages. This standard will be useful for all applications to which the SEM is currently being used, but it has been specifically tailo...

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Detalles Bibliográficos
Autores principales: Postek, Michael T., Vladar, Andras E., Jones, Samuel N., Keery, William J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1993
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4907700/
https://www.ncbi.nlm.nih.gov/pubmed/28053483
http://dx.doi.org/10.6028/jres.098.033

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4907700/
https://www.ncbi.nlm.nih.gov/pubmed/28053483
http://dx.doi.org/10.6028/jres.098.033

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