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Interlaboratory Study on the Lithographically Produced Scanning Electron Microscope Magnification Standard Prototype
NIST is in the process of developing a new scanning electron microscope (SEM) magnification calibration reference standard useful at both high and low accelerating voltages. This standard will be useful for all applications to which the SEM is currently being used, but it has been specifically tailo...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
1993
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4907700/ https://www.ncbi.nlm.nih.gov/pubmed/28053483 http://dx.doi.org/10.6028/jres.098.033 |