Absolute Spatially- and Temporally-Resolved Optical Emission Measurements of rf Glow Discharges in Argon

Spatially- and temporally-resolved measurements of optical emission intensities are presented from rf discharges in argon over a wide range of pressures (6.7 to 133 Pa) and applied rf voltages (75 to 200 V). Results of measurements of emission intensities are presented for both an atomic transition...

Descripción completa

Detalles Bibliográficos
Autores principales: Djurović, S., Roberts, J. R., Sobolewski, M. A., Olthoff, J. K.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology 1993
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4909175/
https://www.ncbi.nlm.nih.gov/pubmed/28053464
http://dx.doi.org/10.6028/jres.098.012

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4909175/
https://www.ncbi.nlm.nih.gov/pubmed/28053464
http://dx.doi.org/10.6028/jres.098.012

Ejemplares similares