Piezoresistive effect in p-type 3C-SiC at high temperatures characterized using Joule heating

Cubic silicon carbide is a promising material for Micro Electro Mechanical Systems (MEMS) applications in harsh environ-ments and bioapplications thanks to its large band gap, chemical inertness, excellent corrosion tolerance and capability of growth on a Si substrate. This paper reports the piezore...

Descripción completa

Detalles Bibliográficos
Autores principales: Phan, Hoang-Phuong, Dinh, Toan, Kozeki, Takahiro, Qamar, Afzaal, Namazu, Takahiro, Dimitrijev, Sima, Nguyen, Nam-Trung, Dao, Dzung Viet
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4923857/
https://www.ncbi.nlm.nih.gov/pubmed/27349378
http://dx.doi.org/10.1038/srep28499

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4923857/
https://www.ncbi.nlm.nih.gov/pubmed/27349378
http://dx.doi.org/10.1038/srep28499

Ejemplares similares