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ZnO-Based Microcavities Sculpted by Focus Ion Beam Milling

We reported an easy fabrication method to realize ZnO-based microcavities with various cavity shapes by focused ion beam (FIB) milling. The optical characteristics of different shaped microcavities have been systematically carried out and analyzed. Through comprehensive studies of cathodoluminescenc...

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Detalles Bibliográficos
Autores principales: Chang, Tsu-Chi, Hong, Kuo-Bin, Lai, Ying-Yu, Chou, Yu-Hsun, Wang, Shing-Chung, Lu, Tien-Chang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4929116/
https://www.ncbi.nlm.nih.gov/pubmed/27364999
http://dx.doi.org/10.1186/s11671-016-1526-2