Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection

The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped be...

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Detalles Bibliográficos
Autores principales: Bouchaala, Adam, Jaber, Nizar, Yassine, Omar, Shekhah, Osama, Chernikova, Valeriya, Eddaoudi, Mohamed, Younis, Mohammad I.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4934184/
https://www.ncbi.nlm.nih.gov/pubmed/27231914
http://dx.doi.org/10.3390/s16060758

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4934184/
https://www.ncbi.nlm.nih.gov/pubmed/27231914
http://dx.doi.org/10.3390/s16060758

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