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Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection
The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped be...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4934184/ https://www.ncbi.nlm.nih.gov/pubmed/27231914 http://dx.doi.org/10.3390/s16060758 |
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author | Bouchaala, Adam Jaber, Nizar Yassine, Omar Shekhah, Osama Chernikova, Valeriya Eddaoudi, Mohamed Younis, Mohammad I. |
author_facet | Bouchaala, Adam Jaber, Nizar Yassine, Omar Shekhah, Osama Chernikova, Valeriya Eddaoudi, Mohamed Younis, Mohammad I. |
author_sort | Bouchaala, Adam |
collection | PubMed |
description | The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a metal-organic framework (MOF), namely HKUST-1, to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming. |
format | Online Article Text |
id | pubmed-4934184 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2016 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-49341842016-07-06 Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection Bouchaala, Adam Jaber, Nizar Yassine, Omar Shekhah, Osama Chernikova, Valeriya Eddaoudi, Mohamed Younis, Mohammad I. Sensors (Basel) Article The objective of this paper is to demonstrate the integration of a MOF thin film on electrostatically actuated microstructures to realize a switch triggered by gas and a sensing algorithm based on amplitude tracking. The devices are based on the nonlinear response of micromachined clamped-clamped beams. The microbeams are coated with a metal-organic framework (MOF), namely HKUST-1, to achieve high sensitivity. The softening and hardening nonlinear behaviors of the microbeams are exploited to demonstrate the ideas. For gas sensing, an amplitude-based tracking algorithm is developed to quantify the captured quantity of gas. Then, a MEMS switch triggered by gas using the nonlinear response of the microbeam is demonstrated. Noise analysis is conducted, which shows that the switch has high stability against thermal noise. The proposed switch is promising for delivering binary sensing information, and also can be used directly to activate useful functionalities, such as alarming. MDPI 2016-05-25 /pmc/articles/PMC4934184/ /pubmed/27231914 http://dx.doi.org/10.3390/s16060758 Text en © 2016 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Bouchaala, Adam Jaber, Nizar Yassine, Omar Shekhah, Osama Chernikova, Valeriya Eddaoudi, Mohamed Younis, Mohammad I. Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection |
title | Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection |
title_full | Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection |
title_fullStr | Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection |
title_full_unstemmed | Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection |
title_short | Nonlinear-Based MEMS Sensors and Active Switches for Gas Detection |
title_sort | nonlinear-based mems sensors and active switches for gas detection |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4934184/ https://www.ncbi.nlm.nih.gov/pubmed/27231914 http://dx.doi.org/10.3390/s16060758 |
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