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A High-Temperature Piezoresistive Pressure Sensor with an Integrated Signal-Conditioning Circuit
This paper focuses on the design and fabrication of a high-temperature piezoresistive pressure sensor with an integrated signal-conditioning circuit, which consists of an encapsulated pressure-sensitive chip, a temperature compensation circuit and a signal-conditioning circuit. A silicon on insulati...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4934339/ https://www.ncbi.nlm.nih.gov/pubmed/27322288 http://dx.doi.org/10.3390/s16060913 |