On the Crystal Structural Control of Sputtered TiO(2) Thin Films

In this study, we focused on the origin on the selective deposition of rutile and anatase TiO(2) thin films during the sputtering process. The observation on microstructural evolution of the TiO(2) films by transmission electron microscopy revealed the coexistence of rutile and anatase TiO(2) phases...

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Detalles Bibliográficos
Autores principales: Jia, Junjun, Yamamoto, Haruka, Okajima, Toshihiro, Shigesato, Yuzo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2016
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4936979/
https://www.ncbi.nlm.nih.gov/pubmed/27389344
http://dx.doi.org/10.1186/s11671-016-1531-5

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4936979/
https://www.ncbi.nlm.nih.gov/pubmed/27389344
http://dx.doi.org/10.1186/s11671-016-1531-5

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