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On the Crystal Structural Control of Sputtered TiO(2) Thin Films
In this study, we focused on the origin on the selective deposition of rutile and anatase TiO(2) thin films during the sputtering process. The observation on microstructural evolution of the TiO(2) films by transmission electron microscopy revealed the coexistence of rutile and anatase TiO(2) phases...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4936979/ https://www.ncbi.nlm.nih.gov/pubmed/27389344 http://dx.doi.org/10.1186/s11671-016-1531-5 |