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Self-forming TiBN Nanocomposite Multilayer Coating Prepared by Pulse Cathode Arc Method
Novel multilayer structured TiBN coatings were deposited on Si (100) substrate using TiBN complex cathode plasma immersion ion implantation and deposition technique (PIIID). The coatings were characterized by X-ray diffraction (XRD), high-resolution transmission electron microcopy (HRTEM), energy-di...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4961656/ https://www.ncbi.nlm.nih.gov/pubmed/27460597 http://dx.doi.org/10.1186/s11671-016-1564-9 |