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Self-forming TiBN Nanocomposite Multilayer Coating Prepared by Pulse Cathode Arc Method

Novel multilayer structured TiBN coatings were deposited on Si (100) substrate using TiBN complex cathode plasma immersion ion implantation and deposition technique (PIIID). The coatings were characterized by X-ray diffraction (XRD), high-resolution transmission electron microcopy (HRTEM), energy-di...

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Detalles Bibliográficos
Autores principales:	Cao, Yongzhi, Hu, Zhenjiang, Yan, Leilei, Yu, Fuli, Tu, Wendi
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Springer US 2016
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4961656/ https://www.ncbi.nlm.nih.gov/pubmed/27460597 http://dx.doi.org/10.1186/s11671-016-1564-9

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