Performance of Nano-Submicron-Stripe Pd Thin-Film Temperature Sensors

Dozens of small dual-beam thin-film temperature sensors with a total width down to 430 nm were fabricated and tested. The sensors were all made from 90-nm-thick Pd thin films, where the width of the narrow stripes was 70–100 nm and that of the wide ones was 210–800 nm. Two different calibration meth...

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Detalles Bibliográficos
Autores principales: Huo, Xiaoye, Xu, Jingjing, Wang, Zhenhai, Yang, Fan, Xu, Shengyong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2016
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4963350/
https://www.ncbi.nlm.nih.gov/pubmed/27465601
http://dx.doi.org/10.1186/s11671-016-1565-8

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4963350/
https://www.ncbi.nlm.nih.gov/pubmed/27465601
http://dx.doi.org/10.1186/s11671-016-1565-8

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