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Performance of Nano-Submicron-Stripe Pd Thin-Film Temperature Sensors
Dozens of small dual-beam thin-film temperature sensors with a total width down to 430 nm were fabricated and tested. The sensors were all made from 90-nm-thick Pd thin films, where the width of the narrow stripes was 70–100 nm and that of the wide ones was 210–800 nm. Two different calibration meth...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4963350/ https://www.ncbi.nlm.nih.gov/pubmed/27465601 http://dx.doi.org/10.1186/s11671-016-1565-8 |