Large area and deep sub-wavelength interference lithography employing odd surface plasmon modes

In this paper, large area and deep sub-wavelength interference patterns are realized experimentally by using odd surface plasmon modes in the metal/insulator/metal structure. Theoretical investigation shows that the odd modes possesses much higher transversal wave vector and great inhibition of tang...

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Detalles Bibliográficos
Autores principales: Liu, Liqin, Luo, Yunfei, Zhao, Zeyu, Zhang, Wei, Gao, Guohan, Zeng, Bo, Wang, Changtao, Luo, Xiangang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4964334/
https://www.ncbi.nlm.nih.gov/pubmed/27466010
http://dx.doi.org/10.1038/srep30450

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4964334/
https://www.ncbi.nlm.nih.gov/pubmed/27466010
http://dx.doi.org/10.1038/srep30450

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