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Structural and electrical properties of oxygen complexes in Cz and FZ silicon crystals implanted with carbon ions
34.50.Dy; 61.10.-i; 68.35.Dv ELECTRONIC SUPPLEMENTARY MATERIAL: The online version of this article (doi:10.1186/1556-276X-9-693) contains supplementary material, which is available to authorized users.
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer New York
2014
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4967622/ https://www.ncbi.nlm.nih.gov/pubmed/27233647 http://dx.doi.org/10.1186/1556-276X-9-693 |