Experimental Analysis of Bisbenzocyclobutene Bonded Capacitive Micromachined Ultrasonic Transducers

Experimental measurement results of a 1.75 mm × 1.75 mm footprint area Capacitive Micromachined Ultrasonic Transducer (CMUT) planar array fabricated using a bisbenzocyclobutene (BCB)-based adhesive wafer bonding technique has been presented. The array consists of 40 × 40 square diaphragm CMUT cells...

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Detalles Bibliográficos
Autores principales: Manwar, Rayyan, Chowdhury, Sazzadur
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4970013/
https://www.ncbi.nlm.nih.gov/pubmed/27347955
http://dx.doi.org/10.3390/s16070959

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4970013/
https://www.ncbi.nlm.nih.gov/pubmed/27347955
http://dx.doi.org/10.3390/s16070959

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