Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties

Micro- and nanomechanical string resonators, which essentially are highly stressed bridges, are of particular interest for micro- and nanomechanical sensing because they exhibit resonant behavior with exceptionally high quality factors. Here, we fabricated and characterized nanomechanical pyrolytic...

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Detalles Bibliográficos
Autores principales: Kurek, Maksymilian, Larsen, Frederik K., Larsen, Peter E., Schmid, Silvan, Boisen, Anja, Keller, Stephan S.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4970142/
https://www.ncbi.nlm.nih.gov/pubmed/27428980
http://dx.doi.org/10.3390/s16071097

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4970142/
https://www.ncbi.nlm.nih.gov/pubmed/27428980
http://dx.doi.org/10.3390/s16071097

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