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NO gas sensing at room temperature using single titanium oxide nanodot sensors created by atomic force microscopy nanolithography

In this work, the fabrication of single titanium oxide nanodot (ND) resistive sensors for NO gas sensing at room temperature is reported. Two atomic force microscopy nanolithography methods, nanomachining and nano-oxidation, are employed. A single titanium nanowire (NW) is created first along with c...

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Detalles Bibliográficos
Autores principales: Hong, Li-Yang, Lin, Heh-Nan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4979878/
https://www.ncbi.nlm.nih.gov/pubmed/27547622
http://dx.doi.org/10.3762/bjnano.7.97