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Catalytic Effects of Cr on Nitridation of Silicon and Formation of One-dimensional Silicon Nitride Nanostructure

The catalytic effects of chromium (Cr) on the direct nitridation of silicon (Si) and morphology of nitridation product were investigated. Cr dramatically improved the conversation of Si to silicon nitride (Si(3)N(4)). The complete conversion was achieved at 1350 °C upon addition of 1.25 wt% Cr. This...

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Detalles Bibliográficos
Autores principales: Liang, Feng, Lu, Lilin, Tian, Liang, Li, Faliang, Zhang, Haijun, Zhang, Shaowei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4985709/
https://www.ncbi.nlm.nih.gov/pubmed/27527681
http://dx.doi.org/10.1038/srep31559