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High Density Crossbar Arrays with Sub- 15 nm Single Cells via Liftoff Process Only

Emerging nano-scale technologies are pushing the fabrication boundaries at their limits, for leveraging an even higher density of nano-devices towards reaching 4F(2)/cell footprint in 3D arrays. Here, we study the liftoff process limits to achieve extreme dense nanowires while ensuring preservation...

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Detalles Bibliográficos
Autores principales: Khiat, Ali, Ayliffe, Peter, Prodromakis, Themistoklis
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5009344/
https://www.ncbi.nlm.nih.gov/pubmed/27585643
http://dx.doi.org/10.1038/srep32614