A Micromachined Piezoresistive Pressure Sensor with a Shield Layer

This paper presents a piezoresistive pressure sensor with a shield layer for improved stability. Compared with the conventional piezoresistive pressure sensors, the new one reported in this paper has an n-type shield layer that covers p-type piezoresistors. This shield layer aims to minimize the imp...

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Detalles Bibliográficos
Autores principales: Cao, Gang, Wang, Xiaoping, Xu, Yong, Liu, Sheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5017451/
https://www.ncbi.nlm.nih.gov/pubmed/27529254
http://dx.doi.org/10.3390/s16081286

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5017451/
https://www.ncbi.nlm.nih.gov/pubmed/27529254
http://dx.doi.org/10.3390/s16081286

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