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Impacts of Annealing Conditions on the Flat Band Voltage of Alternate La(2)O(3)/Al(2)O(3) Multilayer Stack Structures
The mechanism of flat band voltage (V(FB)) shift for alternate La(2)O(3)/Al(2)O(3) multilayer stack structures in different annealing condition is investigated. The samples were prepared for alternate multilayer structures, which were annealed in different conditions. The capacitance-voltage (C-V) m...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5020021/ https://www.ncbi.nlm.nih.gov/pubmed/27620192 http://dx.doi.org/10.1186/s11671-016-1623-2 |