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Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam

Recent progress in nanotechnology enables the production of atomically abrupt interfaces in multilayered junctions, allowing for an increase in the number of transistors in a processor. However, uniform electron transport has not yet been achieved across the entire interfacial area in junctions due...

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Detalles Bibliográficos
Autores principales: Hirohata, Atsufumi, Yamamoto, Yasuaki, Murphy, Benedict A., Vick, Andrew J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5025776/
https://www.ncbi.nlm.nih.gov/pubmed/27586090
http://dx.doi.org/10.1038/ncomms12701