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Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam
Recent progress in nanotechnology enables the production of atomically abrupt interfaces in multilayered junctions, allowing for an increase in the number of transistors in a processor. However, uniform electron transport has not yet been achieved across the entire interfacial area in junctions due...
Autores principales: | Hirohata, Atsufumi, Yamamoto, Yasuaki, Murphy, Benedict A., Vick, Andrew J. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5025776/ https://www.ncbi.nlm.nih.gov/pubmed/27586090 http://dx.doi.org/10.1038/ncomms12701 |
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