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Novel Diamond Films Synthesis Strategy: Methanol and Argon Atmosphere by Microwave Plasma CVD Method Without Hydrogen

Diamond thin films are grown on silicon substrates by only using methanol and argon mixtures in microwave plasma chemical vapor deposition (MPCVD) reactor. It is worth mentioning that the novel strategy makes the synthesis reaction works smoothly without hydrogen atmosphere, and the substrates tempe...

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Detalles Bibliográficos
Autores principales: Yang, Li, Jiang, Caiyi, Guo, Shenghui, Zhang, Libo, Gao, Jiyun, Peng, Jinhui, Hu, Tu, Wang, Liang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer US 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5028358/
https://www.ncbi.nlm.nih.gov/pubmed/27644241
http://dx.doi.org/10.1186/s11671-016-1628-x