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4-Nitrobenzene Grafted in Porous Silicon: Application to Optical Lithography
In this work, we report a method to process porous silicon to improve its chemical resistance to alkaline solution attacks based on the functionalization of the pore surface by the electrochemical reduction of 4-nitrobenzendiazonium salt. This method provides porous silicon with strong resistance to...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5042913/ https://www.ncbi.nlm.nih.gov/pubmed/27686091 http://dx.doi.org/10.1186/s11671-016-1654-8 |