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Electrostatic repulsive out-of-plane actuator using conductive substrate

A pseudo-three-layer electrostatic repulsive out-of-plane actuator is proposed. It combines the advantages of two-layer and three-layer repulsive actuators, i.e., fabrication requirements and fill factor. A theoretical model for the proposed actuator is developed and solved through the numerical cal...

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Detalles Bibliográficos
Autores principales: Wang, Weimin, Wang, Qiang, Ren, Hao, Ma, Wenying, Qiu, Chuankai, Chen, Zexiang, Fan, Bin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5054362/
https://www.ncbi.nlm.nih.gov/pubmed/27713542
http://dx.doi.org/10.1038/srep35118