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Electrostatic repulsive out-of-plane actuator using conductive substrate
A pseudo-three-layer electrostatic repulsive out-of-plane actuator is proposed. It combines the advantages of two-layer and three-layer repulsive actuators, i.e., fabrication requirements and fill factor. A theoretical model for the proposed actuator is developed and solved through the numerical cal...
Autores principales: | Wang, Weimin, Wang, Qiang, Ren, Hao, Ma, Wenying, Qiu, Chuankai, Chen, Zexiang, Fan, Bin |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2016
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5054362/ https://www.ncbi.nlm.nih.gov/pubmed/27713542 http://dx.doi.org/10.1038/srep35118 |
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