One-step Maskless Fabrication and Optical Characterization of Silicon Surfaces with Antireflective Properties and a White Color Appearance

We report a simple one-step maskless fabrication of inverted pyramids on silicon wafers by reactive ion etching. The fabricated surface structures exhibit excellent anti-reflective properties: The total reflectance of the nano inverted pyramids fabricated by our method can be as low as 12% without a...

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Detalles Bibliográficos
Autores principales: Schneider, Ling, Feidenhans’l, Nikolaj A., Telecka, Agnieszka, Taboryski, Rafael J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5057096/
https://www.ncbi.nlm.nih.gov/pubmed/27725703
http://dx.doi.org/10.1038/srep35183

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5057096/
https://www.ncbi.nlm.nih.gov/pubmed/27725703
http://dx.doi.org/10.1038/srep35183

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