Nanoscale solely amorphous layer in silicon wafers induced by a newly developed diamond wheel

Nanoscale solely amorphous layer is achieved in silicon (Si) wafers, using a developed diamond wheel with ceria, which is confirmed by high resolution transmission electron microscopy (HRTEM). This is different from previous reports of ultraprecision grinding, nanoindentation and nanoscratch, in whi...

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Detalles Bibliográficos
Autores principales: Zhang, Zhenyu, Guo, Liangchao, Cui, Junfeng, Wang, Bo, Kang, Renke, Guo, Dongming
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5062251/
https://www.ncbi.nlm.nih.gov/pubmed/27734934
http://dx.doi.org/10.1038/srep35269

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5062251/
https://www.ncbi.nlm.nih.gov/pubmed/27734934
http://dx.doi.org/10.1038/srep35269

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