Fabrication of All-SiC Fiber-Optic Pressure Sensors for High-Temperature Applications

Single-crystal silicon carbide (SiC)-based pressure sensors can be used in harsh environments, as they exhibit stable mechanical and electrical properties at elevated temperatures. A fiber-optic pressure sensor with an all-SiC sensor head was fabricated and is herein proposed. SiC sensor diaphragms...

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Detalles Bibliográficos
Autores principales: Jiang, Yonggang, Li, Jian, Zhou, Zhiwen, Jiang, Xinggang, Zhang, Deyuan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5087448/
https://www.ncbi.nlm.nih.gov/pubmed/27763494
http://dx.doi.org/10.3390/s16101660

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5087448/
https://www.ncbi.nlm.nih.gov/pubmed/27763494
http://dx.doi.org/10.3390/s16101660

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