Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors

Micro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequency stability. Synchronization phenomena in multiple MEMS re...

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Detalles Bibliográficos
Autores principales: Torres, Francesc, Uranga, Arantxa, Riverola, Martí, Sobreviela, Guillermo, Barniol, Núria
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2016
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5087478/
https://www.ncbi.nlm.nih.gov/pubmed/27754377
http://dx.doi.org/10.3390/s16101690

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5087478/
https://www.ncbi.nlm.nih.gov/pubmed/27754377
http://dx.doi.org/10.3390/s16101690

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