Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200 °C

The fatigue properties of ultrathin protective coatings on silicon thin films were investigated. The cohesive and delamination fatigue properties of 22 nm-thick atomic-layered-deposited (ALD) titania were characterized and compared to that of 25 nm-thick alumina. Both coatings were deposited at 200...

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Detalles Bibliográficos
Autores principales: Sadeghi-Tohidi, Farzad, Samet, David, Graham, Samuel, Pierron, Olivier N
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Taylor & Francis 2014
Materias:
Papers
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5090606/
https://www.ncbi.nlm.nih.gov/pubmed/27877645
http://dx.doi.org/10.1088/1468-6996/15/1/015003

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5090606/
https://www.ncbi.nlm.nih.gov/pubmed/27877645
http://dx.doi.org/10.1088/1468-6996/15/1/015003

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