Cargando…
Comparison of the cohesive and delamination fatigue properties of atomic-layer-deposited alumina and titania ultrathin protective coatings deposited at 200 °C
The fatigue properties of ultrathin protective coatings on silicon thin films were investigated. The cohesive and delamination fatigue properties of 22 nm-thick atomic-layered-deposited (ALD) titania were characterized and compared to that of 25 nm-thick alumina. Both coatings were deposited at 200...
Autores principales: | Sadeghi-Tohidi, Farzad, Samet, David, Graham, Samuel, Pierron, Olivier N |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Taylor & Francis
2014
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5090606/ https://www.ncbi.nlm.nih.gov/pubmed/27877645 http://dx.doi.org/10.1088/1468-6996/15/1/015003 |
Ejemplares similares
-
Atomic Layer Deposition of Alumina-Coated Thin-Film Cathodes for Lithium Microbatteries
por: O’Donoghue, Aaron, et al.
Publicado: (2023) -
SERS Taper-Fiber Nanoprobe Modified by Gold Nanoparticles Wrapped with Ultrathin Alumina Film by Atomic Layer Deposition
por: Xu, Wenjie, et al.
Publicado: (2017) -
Influence of Alumina Addition on the Optical Properties and the Thermal Stability of Titania Thin Films and Inverse Opals Produced by Atomic Layer Deposition
por: Waleczek, Martin, et al.
Publicado: (2021) -
Improvement of a Cohesive Zone Model for Fatigue Delamination Rate Simulation
por: Pirondi, Alessandro, et al.
Publicado: (2019) -
Parameter
Space of Atomic Layer Deposition of Ultrathin Oxides on Graphene
por: Aria, Adrianus I., et al.
Publicado: (2016)