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Effect of magnetron sputtering parameters and stress state of W film precursors on WSe(2) layer texture by rapid selenization
Tungsten diselenide (WSe(2)) film was obtained by rapid selenization of magnetron sputtered tungsten (W) film. To prevent WSe(2) film peeling off from the substrate during selenization, the W film was designed with a double-layer structure. The first layer was deposited at a high sputtering-gas pres...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group
2016
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5095554/ https://www.ncbi.nlm.nih.gov/pubmed/27812031 http://dx.doi.org/10.1038/srep36451 |